Phosphorus-based compounds for EUV multilayer optics materials
نویسندگان
چکیده
منابع مشابه
Phosphorus-based compounds for EUV multilayer optics materials
We have evaluated the prospects of phosphorus-based compounds in extreme ultraviolet multilayer optics. Boron phosphide (BP) is suggested to be used as a spacer material in reflective multilayer optics operating just above the L-photoabsorption edge of P (λ ≈9.2 nm). Mo, Ag, Ru, Rh, and Pd were considered for applications as reflector materials. Our calculations for multilayer structures with p...
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ژورنال
عنوان ژورنال: Optical Materials Express
سال: 2015
ISSN: 2159-3930
DOI: 10.1364/ome.5.001450